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Grade Standard
Test
(300mm)
Particles
Test
Epitaxial Layer
on Si ( P⁄P+ )
Epitaxial Layer
on Si ( P⁄P- )
Litho Test Particles
Test
-Thin-4L
Diameter mm 300.0±0.2 300.0±0.2 300.0±0.2 300.0±0.2 300.0±0.2 300.0±0.2
type --- P P P P P P
Resistivity Ωcm ≧1.0 ≧1.0 ≦0.02 ≧1.0 ≧1.0 ≧1.0
Dopant --- Boron Boron Boron Boron Boron Boron
Surface orientation ° <100>0±1 <100>0±1 <100>0±1 <100>0±1 <100>0±1 <100>0±1
Notch orientation ° (011)±1.0 (011)±1.0 (011)±1.0 (011)±1.0 (011)±1.0 (011)±1.0
Epi layer thk um --- --- 2 - 6 2 - 6 --- ---
Epi layer res Ωcm --- --- ≧1.0 ≧1.0 --- ---
Edge profile --- Taper Taper Taper Taper Taper Taper
& Round
Oxygen Conc. E17atoms⁄cc N⁄S 8.5 - 13.3 N⁄S N⁄S N⁄S N⁄S
Carbon Conc. E16atoms⁄cc N⁄S 0 - 1.5 N⁄S N⁄S N⁄S N⁄S
Front surface finish --- Polished Polished Polished Polished Polished Polished
Back surface finish --- Polished Polished Polished Polished Polished Polished
Edge surface finish --- Polished Polished Polished Polished Polished Polished
Metal contami. E10atoms⁄cm2 ≦5.0 ≦5.0 ≦5.0 ≦5.0 ≦5.0 ≦5.0
Thickness um 775±25 775±25 775±25 775±25 775±25 760±10
GBIR um ≦2.0 ≦2.0 ≦2.0 ≦2.0 ≦1.0 ≦5.0
Site flatness um N⁄S N⁄S N⁄S N⁄S SFQR ≦0.07
(26x8mm)
N⁄S
LPD pcs⁄W ≧90nm
≦30
≧65nm
≦50
≧65nm
≦50
≧65nm
≦50
≧200nm
≦30
≧90nm
≦100
LM ID --- semi M1
(2D+OCR)
semi M1
(2D+OCR)
semi M1
(2D+OCR)
semi M1
(2D+OCR)
Non LM 4-point LM
Order ---
Grade Standard
Test
(300mm)
Particles
Test
Epitaxial Layer
on Si ( P⁄P+ )
Epitaxial Layer
on Si ( P⁄P- )
Litho Test Particles
Test
-Thin-4L

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